Publications (FIS)
Nonevaporable getter-MEMS for generating UHV conditions in small volumina
- authored by
- Leonard Frank Diekmann, Alexander Kassner, Folke Dencker, Marc Christopher Wurz
- Abstract
The industrial use of quantum sensors requires further miniaturization of the experimental peripherals, i.e., the high vacuum chamber, laser technology, and control electronics. A central part of the high vacuum chamber is the maintenance of vacuum conditions. For this purpose, a prototype of a compact, i.e., miniaturized, ultrahigh vacuum pump in the form of a nonevaporable getter (NEG) pump at a wafer level (MEMS), is developed within the scope of this work. With regard to the basic conditions of the functionality of the NEG, a miniaturized heating plate with temperature sensors is analytically and numerically developed, constructed, and characterized in an ultrahigh vacuum test stand. This is followed by the integration of the NEG into the existing system, which, in connection with the characterization of material-specific parameters, enables a first correlation of heat input and pumping power. Thus, performance data of the getter-MEMS under high-vacuum confinement confirm its usability for quantum sensors. In addition, optimization potentials are shown with regard to all partial aspects of the MEMS.
- Organisation(s)
-
Institute of Microtechnology
QuantumFrontiers
- Type
- Article
- Journal
- Journal of Vacuum Science and Technology B
- Volume
- 40
- ISSN
- 2166-2746
- Publication date
- 09.2022
- Publication status
- Published
- Peer reviewed
- Yes
- ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials, Instrumentation, Process Chemistry and Technology, Surfaces, Coatings and Films, Electrical and Electronic Engineering, Materials Chemistry
- Electronic version(s)
-
https://doi.org/10.1116/6.0001991 (Access:
Open)